Sliding components for pumps and seals, components for manufacturing equipment of semiconductors and LCDs, etc. are produced in integrated operations comprising the preparation of raw materials to the final product.
Special Materials
ENGINEERING CERAMICSJapan Fine Ceramics Co.,Ltd.
Engineering Ceramics Manufacturing Process
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Silicon Carbide (SiC)
Silicon carbide has excellent
chemical resistance and stable
high-temperature properties.
With the use of a specially designed
large atmospheric furnace, long and
large diameter products can be provided.
- ・Excellent mechanical strength at high temperatures
- ・High thermal conductivity
- ・Wear resistance
- ・Corrosion resistance
- Sliding components
(mechanical seals, bearings, etc.) - Components for chemical pumps
(shafts, bearings, etc.) - Components for semiconductor and LED manufacturing equipment
(wafer forks, wafer chucks, thrusting pins, susceptors, MOCVD trays, etc.) - Wear resistant components
(blast nozzles, crusher liners, etc.) - Heat resistant component
(burner nozzles, components for heat exchangers, etc.)
Silicon Nitride (Si3N4)
Silicon nitride has excellent thermal shock resistance.
Furthermore, due to having high
mechanical strength at high temperatures and excellent wear resistance, silicon
nitride is used in variety industrial equipment.
- ・Thermal shock resistance
- ・Excellent mechanical strength at high temperature
- ・Wear resistance
- ・Corrosion resistance
- ・Electrical insulating properties
- Bearing components
- Components for semiconductor and LCD manufacturing equipment (inspection tables for IC, clampers, chucks, thrusting pins, focus rings, etc.)
- Components for semiconductor and LED manufacturing equipment
(wafer forks, wafer chucks, thrusting pins, susceptors, MOCVD trays, etc.) - Wear resistant components
(motor shafts, bearings,etc.) - Heat resistant components
(burner nozzles, crucibles for melting metal, squeeze rolls, etc.)
Alumina (Al2O3)
Aluminum has excellent electrical insulating properties and is the most popular material for this purpose due to its well-balanced properties.
Alumina is also used in etching equipment due to its high resistance to corrosion and plasma.
- ・Electrical insulating properties
- ・High fracture toughness at room temperature
- ・Heat resistance
- ・Wear resistance
- ・Corrosion resistance
- Components for semiconductor manufacturing equipment (chamber components, insulating flanges, wafer forks, etc.)
- Electrical insulating components (insulators, spacers,bushes, etc.)
- General industrial machinery components (shafts, bearings, etc.)
- Wear resistant components (thread paths, rails, guides, etc.)
Zirconia（ZrO2)
Zirconia has excellent mechanical strength
and fracture toughness at room
temperature and is characterized by having a low thermal conductivity.
Furthermore, practical applications in precision machined components are growing as its small material grain enables high-precision finish machining.
- ・High mechanical strength at room temperature
- ・High fracture toughness at room temperature
- ・Thermal expansion similar to that of metal
- ・Wear resistance
- ・Heat insulating properties
- Molds, jigs, and tools (various molds, precision positioning jigs, heat treatment jigs, insulating jigs, etc.)
- Base materials for blades (slitters, etc.)
- Wear resistant components (crushing machine parts, guide rollers, chuck claws for automated machinery, etc.)
